A type of 2-dimensional planar pattern with spatial resolution can be easily produced using scanning probe lithography (SPL). However,it has not been used successfully for fabricating 3-dimensional (3D) structures due to the low aspect ratio of the resulting structure. Herein,w e describe a method for fabricating a 3D functionalized structure via a combination of SPL and self-assembly techniques. In this study,a 3D structure was established on a Si surface with a passivated monolayer via SPL. The patterned layer was modified using a
-functionalized organosilane. Lateral force microscopy (LFM) was applied to discriminate the chemical functionalities and gold nanoparticles were also used to clearly identify the modified layer.

Keywords: AFM Anodic Oxidation,Later al Force Microscopy (LFM),Scanning Probe Lithography (SPL),Self-Assemb ly,3D Structure.