引用文献
Characteristics of In-situ Annealed LiMn2O4 Thin Films for a MEMS Power System
2013-03-21 14:23:46
文件类型 : PDF
文件提取码 : 应用:电池测试
简要说明 : WBCS3000多通道自动电池测试系统

LiMn2O4 lms were deposited by using rf magnetron sputtering. To obtain the spinel phase, we heated the stainless-steel substrate to 450 C during deposition (in-situ annealing). The lms deposited at ambient temperature had an amorphous phase. At lower substrate temperatures (below 400?